Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni (Q81325850)
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scientific article published on 01 July 2005
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni |
scientific article published on 01 July 2005 |
Statements
Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni (English)
Gonzalo F Iriarte
Johan Bjurström
Jörgen Westlinder
Fredrik Engelmark
Ilia V Katardjiev