In-situ surface preparation of nominally on-axis 4H-SiC substrates (Q62570202)
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English | In-situ surface preparation of nominally on-axis 4H-SiC substrates |
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In-situ surface preparation of nominally on-axis 4H-SiC substrates (English)
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October 2008
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310
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20
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4430-4437
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