In-situ surface preparation of nominally on-axis 4H-SiC substrates (Q62570202)

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In-situ surface preparation of nominally on-axis 4H-SiC substrates
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    In-situ surface preparation of nominally on-axis 4H-SiC substrates (English)
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    J.P. Bergman
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    October 2008
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    310
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    20
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    4430-4437
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