Imaging modes for potential mapping in semiconductor devices by electron holography with improved lateral resolution (Q39778483)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Imaging modes for potential mapping in semiconductor devices by electron holography with improved lateral resolution |
scientific article |
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Imaging modes for potential mapping in semiconductor devices by electron holography with improved lateral resolution (English)
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Petr Formánek
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Jan Sickmann
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Martin Linck
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Uwe Muehle
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Hannes Lichte
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23 December 2010
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111
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4
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290-302
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