Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst (Q35435133)

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6 March 2020

title

Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst (English)

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4

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author name string

Guo-Yong Fang

1

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6 March 2020

Li-Na Xu

2

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6 March 2020

Lai-Guo Wang

3

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Di Wu

5

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6 March 2020

Ai-Dong Li

6

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publication date

18 February 2015

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Nanoscale Research Letters

6 March 2020

published in

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volume

10

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page(s)

68

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Creative Commons Attribution 4.0 International

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copyright license

start time

18 February 2015

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April 2022 Public Data File from Crossref

copyright status

copyrighted

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cites work

Atomic layer deposition of hafnium oxide from hafnium chloride and water

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Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2.

27 July 2018

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Rapid atomic layer deposition of silica nanolaminates: synergistic catalysis of Lewis/Brønsted acid sites and interfacial interactions

26 September 2018

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Theoretical studies on the water-assisted hydrolysis of N,N-dimethyl-N'-(2',3'-dideoxy-3'-thiacytidine) formamidine with three water molecules

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Thermodynamics and kinetics of intramolecular water assisted proton transfer in Na -1-methylcytosine water complexes

26 September 2018

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Solvent effects on glycine II. Water-assisted tautomerization

26 September 2018

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Rapid vapor deposition of highly conformal silica nanolaminates

26 September 2018

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Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources

26 September 2018

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Density Functionals with Broad Applicability in Chemistry

26 September 2018

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The M06 suite of density functionals for main group thermochemistry, thermochemical kinetics, noncovalent interactions, excited states, and transition elements: two new functionals and systematic testing of four M06-class functionals and 12 other fun

21 January 2018

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Atomic Layer Deposition of Nanostructured Materials

21 January 2018

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A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide

21 January 2018

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Oxo-hydroxy tautomerism of 5-fluorouracil: water-assisted proton transfer

21 January 2018

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12 December 2020

Reaction paths of the water-assisted solvolysis of N,N-dimethylformamide

1 reference

12 December 2020

A computational chemistry investigation of the mechanism of the water-assisted decomposition of trichloroethylene oxide

1 reference

12 December 2020

Growth of SiO2 at room temperature with the use of catalyzed sequential half-reactions

1 reference

12 December 2020

10.1186/S11671-014-0714-1

Identifiers

DOI

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Dimensions Publication ID

6 March 2020

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PubMed publication ID

25897298

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