Aluminum nitride on titanium for CMOS compatible piezoelectric transducers (Q30482564)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Aluminum nitride on titanium for CMOS compatible piezoelectric transducers |
scientific article |
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Aluminum nitride on titanium for CMOS compatible piezoelectric transducers (English)
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Joseph C Doll
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Bryan C Petzold
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Biju Ninan
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Ravi Mullapudi
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Beth L Pruitt
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1 January 2010
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20
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25008
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