Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena (Q29043658)

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journal
  • Journal of vacuum science & technology. B, Microelectronics processing and phenomena
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Language Label Description Also known as
English
Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena
journal
  • Journal of vacuum science & technology. B, Microelectronics processing and phenomena

Statements

title
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (English)
1 reference
stated in
ISSN Portal
ISSN
0734-211X

Identifiers

ISSN
0734-211X
subject named as
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
distribution format
printed matter
0 references
2327-9877
subject named as
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
distribution format
online publication
1 reference
retrieved
23 March 2018
reference URL
https://api.crossref.org/journals/2327-9877
ISSN-L
0734-211X
0 references
Crossref journal ID
5527
0 references
HAL journal ID
16452
0 references
OpenAlex ID
V4210191927
0 references
Scilit journal ID
1393127
0 references
Scopus source ID
32160
0 references
 
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