Rigaku Semiconductor Metrology Solutions

Rigaku Semiconductor Metrology Solutions

Semiconductor Manufacturing

X-ray Metrology Tools for the Semiconductor and Micro-electronics Industry.

About us

At Rigaku Semiconductor Metrology Division we work with Integrated Device Manufacturers, Small Manufacturers, Equipment Suppliers, and Far back-end of line and packaging to provide Metrology Solutions that will assure product quality, high profitability, compelling cost of ownership, and productivity metrics for Semiconductor R&D and high-volume manufacturing. X-ray Metrology Tools For the Semiconductor Industry. Rigaku Semiconductor Metrology Division specializes in providing WDXRF, XRR, EDXRF & Optical; TXRF; HRXRD; and CDSAXS; metrology tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. Global 24/7 service and support, Rigaku Semiconductor Metrology Tools delivers cutting-edge solutions for yield enhancement and process development. XRF, XRD, AND XRR FOR THIN FILM CHARACTERIZATION With the continual demand of the semiconductor industry, integrated circuits (IC) demonstrate higher performance at a lower cost than their predecessors. Wafer metrology tools are used to design and manufacture ICs by carefully controlling the film properties, linewidths, and potential defect levels to optimize the manufacturing process of these devices. Rigaku’s X-ray Metrology tools and wafer inspection capabilities can target semiconductor devices' physical and electrical properties under production. Wafer metrology can specifically identify surface particles, pattern flaws, and other conditions that could cause adverse effects on the performance of these devices. Rigaku is a pioneer and world leader in designing and manufacturing X-ray-based measurement tools (X-ray diffraction, X-ray fluorescence, and X-ray reflectometry) to solve semiconductor manufacturing challenges. With about 30 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization.

Website
https://rsmd.rigaku.com/
Industry
Semiconductor Manufacturing
Company size
1,001-5,000 employees

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