#IntelligentSensorSolutionsExplained
💡 Mass spectrometry is used for the identification and quantification of chemical compounds based on their mass-to-charge ratio. When deployed as a #gasanalyzer, mass spectrometers can measure gas mixtures to determine composition of species, isotopic analysis and trace level contaminants or impurities. This technology is widely used in #semiconductor manufacturing to characterize the composition of #vacuum chambers with high sensitivity and precision. Applications include air leak detection, process monitoring and contamination analysis in PVD, ALD, CVD, Etch, Lithography, Diffusion, RTP, Implant, Metrology and other semi processes.
#Massspectrometry based residual gas analyzers are critical for maintaining a clean and controlled environment in vacuum systems and process chambers during semi manufacturing.
Additionally, this technology can help identify and analyze contaminants on incoming semiconductor #wafers that could contaminate a tool or chamber. This provides an opportunity to interdict and isolate the contaminated equipment, avoiding mass scrap events from excursion events. Failure analysis is aided by mass spectrometry and plays a key role in identifying and analyzing anomalies in semiconductor processing equipment – important for maximizing yield and throughput.
➡️ To learn more about residual gas analyzers using mass spectrometry, visit: https://lnkd.in/dU8h4p4u
Also, watch our on-demand webinar to learn about Transpector APX for ALD, CVD and Etch applications https://lnkd.in/dPViGK-c
#INFICON #Massspec #Transpector #RGA #Residualgasanalyzers #Semiconductor #GasAnalyzer #IntelligentSensorSolutions #Innovation
--
3moTalented 🤩 T E L and advanced.