Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
External Dimension
SEC-N100 Series
Digital Mass Flow Controller
The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy ( /- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its' cost reduction capabilities in your process.
*1 Excluding SEC-N17X Series.
View our MFC comparison chart here.
- Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM
- Wide variety of communications and power supply
- High S.P. accuracy: /- 1.0% S.P. (*1)
- 1 second high speed response (*1)
- Multi-gas, multi-range solution
The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.
| Models | Select communication mode | Select power supply |
| SEC-N102 series | Digital communication ▶RS485 F-NET Protocol Analog communication ▶0〜5VDC | ±15VDC(±5%) HORIBA'S lineup includes leased power supply PE series. |
| SEC-N104 series | DeviceNet™ communication | Conforming to ODVA standards |
| SEC-N105 series | CC-Link® communication Analog communication ▶0 to 5VDC, 0 to 10VDC 4 to 20mA | Conforming to CC-Link® standards 24VDC (13 to 32VDC) |
| SEC-N106 series | PROFIBUS™ communication Analog communication ▶0 to 5VDC, 0 to 10VDC 4 to 20mA | Conforming to PROFIBUS™ standards 24VDC(13 to 32VDC) |
| SEC-N107 | EtherCAT® communication | Conforming to EtherCAT® standards 24VDC |
*1 Excluding SEC-N17X Series
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