【Basic Specification】
| Product name | Chemical Solution Monitoring System |
|---|---|
| Model | CS-1000 |
| Measurement item | Chemical Concentration, Conductivity, pH |
| Measurement principle | Absorption spectroscopic method, 2-electrode method, Glass electrode |
| Target chemicals | Multi-component chemical solutions used in semiconductor manufacturing processes (Please contact us for details) |
| Dimension | 700 (W) × 610 (D) × 1640 (H) mm (Excluding protrusions) |
| Weight | Approx. 200kg |
| Wetted materials | Cabinet (PFA, PTFE) Absorbance Monitor (PFA, PTFE, Quartz, Kalrez™) Conducvitity Meter (PFA, Carbon, Kalrez™) pH Meter - Drain use (PVC, PTFE, Glass, ETFE, PEEK, Olefinic resin, THV, PFA, Kalrez™, PharMed BPT) ※Karlez™ is trademarks of DuPont de Nemours, Inc. |
| Conforming standards | CE , KC , FCC Rules Part15 , UKCA , SEMI S2 |
【Condition of installation】
| Ambient temperature | 20 to 30 degree C (Within ± 0.5 degree/1hour, sudden temperature change should be avoided) |
|---|---|
| Ambient humidity | 40 to 70%RH (Should be no dew condensation) |
| Power source | AC 190～240V (Single-Phase）、50/60Hz |
| Power consumption | Approx. 355VA (Transient electric current at the time of the start is excluded) |
| Communication | Analog Output: Hardwired_4-20mA, Serial: RS-485_Modbus RTU, Parallel IO (refer to attachement) ※ Signal output is fixed at 1.5mA when measured values are not updated, such as monitor error. |
【Maintenance】
| Consumables | Replacement parts by customer or HORIBA service engineers. Halogen lamp (Rated life: approx. 1 year) Deteurium lamp (Rated life: approx. half year) Reagent： pH4, pH7, KCl 3.33moL AgCl Saturate (Raplacement term: approx. half year) |
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