LU Series

Liquid Auto Refill System

The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination.

The LU Series includes a function for automatically implementing a remaining liquid purge sequence.

Using the LU Series, product throughput and maintenance efficiency is improved.

Segment: Semiconductor

Division: Fluid Control System

Manufacturing Company: HORIBA STEC, Co., Ltd.

Vapour pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard
A load cell monitoring the remaining amount of material in the mother tank is available as an option
Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings
Easy component replacement during routine maintenance
Degasifier module comes as standard reducing the risk of bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications
Improved safety: a variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur
Improved operability: operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.

Model	LU-A1000 series
Liquids supported	TEOS, TMOB, TMOP, TEOP, BTBAS
Supply method	Pressure movement from He gas
Gas supply pressure	For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N₂ 0.6 to 0.7 MPa (G)
Tank	Maximum 5-gallon container can be attached (outside of production range)
Operation	Automatic supply/stop using external signal from supply system
Operation area display details	Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.
Gas connection	Refer to basic flow
Power source	AC 100 to 240 V, 50/60 Hz, 300 VA
Electricity connection	AC 100 to 240 V breaker connection, signal receptacle
External dimensions	See external dimensions diagram

* Please make decisions regarding the specifications above after meeting with STEC.