DZ-100 Ultra-thin Mass Flow Module

Ultra-thin Mass Flow Module

The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

• Fast response (≦0.4 sec)

• Light weight, Compact(width: 10mm, height: 99mm)

• Expansion of operating supply pressure range

Model	DZ-114S
Specification	H		M		L
Full-scale flow rate (N2 conversion flow rate)	80 SCCM ~ 2.9 SLM		53 SCCM ~ 1.7 SLM		11 SCCM ~ 450 SCCM
Operating inlet pressure	370 ~ 900 kPa (A)		240 ~ 369 kPa (A)		110 ~ 239 kPa (A)
Operating differential pressure	> 350 kPa (D)		> 240 kPa (D)		> 110kPa (D)
Operating downstream pressure	≦ 13.3 kPa (A)	≦ 53.3 kPa (A)	≦ 13.3 kPa (A)	≦ 53.3 kPa (A)	≦ 13.3 kPa (A)	≦ 53.3 kPa (A))
Control range	1.0 ~ 100% F.S.	2.0 ~ 100% F.S.	2.0 ~ 100% F.S.	4.0 ~ 100% F.S.	5.0 ~ 100% F.S.	10 ~100% F.S.
Flow rate accuracy 1,2	±0.5% S.P. (20 ~ 100% F.S.) ±0.1% F.S. (1 ~ 20% F.S.)		±0.5% S.P. (40 ~ 100% F.S.) ±0.2% F.S. (2 ~ 40% F.S.)		±1.0% F.S. (5 ~ 100% F.S.)
Offset / Span stability	±0.5% F.S. / year		±1% F.S. / year		±5% F.S. / year
Repeatability *1	±0.3% S.P. (10 ~ 100% F.S.) ±0.03% F.S. (1 ~ 10% F.S.)	±0.3% S.P. (20 ~ 100% F.S.) ±0.06% F.S. (2 ~ 20% F.S.)	±0.3% S.P. (20 ~ 100% F.S.) ±0.06% F.S. (2 ~ 20% F.S.)	±0.3% S.P. (40 ~ 100% F.S.) ±0.12% F.S. (4 ~ 40% F.S.)	±0.3% S.P. (5 ~ 100% F.S.)	±0.3% S.P. (10 ~ 100% F.S.)
Valve type	Normally Closed / Piezo Actuator
Step-up flow response time 3,4	≦ 0.4 sec
Valve seat leak	< 0.5% F.S.			< 1.0% F.S		< 2.0% F.S.
Proof pressure	1.0 MPa (A)
Leak integrity	≦ 5.0 × 10-12 Pa m3/sec (He)
Wetted materials	SUS316L, Ni-Alloy, PFA, PCTFE
Operating temperature	15~45°C
Storage temperature	0~80°C
Mounting orientation	Attitude Insensitive
Temperature measurement accuracy	±1°C (15~45°C)
Warm-up operation time	> 30 minutes
Control interface *5	DeviceNetTM Protocol
Power supply	Master 1 PC, Slave (DZ-114S) 1PC : 8.2 VA (Slave 4.8 VA/PC) Up to 4 Slaves can be connected
1 Flow rate accuracy and repeatability are guaranteed only for calibration gas and calibration full scale. (Outlet < 13.3 kPaA) 2 Temperature range in which “accuracy” is guaranteed is in accordance with SEMI: E56-0309. 3 Settling time is MFC output signal and N2 gas. Other detail definition follows settling time of SEMI Standard E17-1011 Section 4.1.4. 4 Step up response time is confirmed in manufacturing calibration condition. Actual response time will be gas, flow and pressure dependent. *5 Refer to the “DZ-114S DeviceNet™ Communication Manual” for details of communication.

Model	DZ-104M
Operating temperature	15 ~ 45°C
Storage temperature	0 ~ 80°C
Installation orientation	Attitude Insensitive
Control interface	Shield type micro-connector (M12), DeviceNetTM Protocol
Connection interface	4 Port interlocking position : Bottom of main body

DZ-104M Shield Type Micro Connector (M12)

Pin Number	Signal Name	Specification
1	Drain	-
2	V	11-25 VDC, Rated Voltage: 24V
3	V-	11-25 VDC, Rated Voltage: 24V
4	CAN_H	DeviceNetTM Protocol
*During the series of operations, the rated voltage is used. Use power supplies and cables that are conplance with ODVA.